Publications
Electronics Letters 33, no. 19, 1997, 1626-1627 E. Voges, K. Kuckehaus, and B. Hosselbarth, " True time delay integrated optical RF phase shifters in lithium niobate " , Electronics Letters 33, no. 23, [...] Fischer, and E. Voges, " Experimental study and computer simulation of aspect ratio dependent effects observed in silicon reactive ion etching ", Microelectronic Engineering, 30, 1996, 245-248 1995 P. Krummrich [...] Silicon ", Microelectronic Engineering, 23, no. 1-4, 1994, 373-376 V.A. Yunkin, I.W. Rangelow, J.A. Schäfer, D. Fischer, E. Voges, and S. Sloboshanin, " Experimental Study of Anisotropy Mechanisms During …
